Method and image sensor with extended pixel dynamic range incorporating transfer gate with potential well

ABSTRACT

A charge transfer transistor includes: a first diffusion region and a second diffusion region; a gate for controlling a charge transfer from the first diffusion region to the second diffusion region by a control signal; and a potential well incorporated under the gate, wherein the first diffusion region is a pinned photodiode. A pixel of an image sensor includes: a photodiode for generating and collecting a photo generated charge; a floating diffusion region for serving as a photo generated charge sensing node; a transfer gate for controlling a charge transfer from the photodiode to the floating diffusion region by a control signal; and a potential well incorporated under the transfer gate.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present invention claims priority of Korean patent applicationnumber 10-2006-0040713, filed on May 4, 2006 which is incorporated byreference in its entirety.

BACKGROUND OF THE INVENTION

The present invention relates to a solid-state image sensor having animproved performance with a higher charge well capacity which results ina higher dynamic range (DR) and a better signal to noise ratio (SNR),and more particularly to a complementary metal oxide semiconductor(CMOS) image sensor.

A typical pixel of the CMOS image sensor includes a photodiode, moreprecisely a pinned photodiode, and four transistors. The photodiodecollects a photo-generated charge that is later transferred at asuitable moment by a charge transfer transistor onto a floatingdiffusion (FD) node which detects the charge. Prior to the chargetransfer, however, the FD node must be first reset by a reset transistorto a suitable reference voltage, which is usually a terminal biasvoltage, Vdd, or a bias close to this level. The reset causes kTC noise,which is normally added to a signal appearing on the FD node. Thus, itis necessary to read a voltage on the FD node twice, before and afterthe charge transfer. This operation is called a correlated doublesampling (CDS) procedure and the CDS procedure allows sensing of onlythe voltage difference of the FD node caused by the charge transferredfrom the photodiode. A source follower (SF) transistor with a gateconnected to the FD node, one terminal connected to the Vdd and theother terminal connected to a common column sense line via an addressingtransistor performs sensing of the voltage on the FD node. For thisreason, it is necessary to incorporate the four transistors in eachpixel of a standard CMOS image sensor. The four transistors (4T) pixelcircuit with the pinned photodiode is proposed in U.S. Pat. No.5,625,210 issued to Lee, entitled “Active Pixel Sensor Integrated with aPinned Photodiode”.

In modern CMOS sensor designs, circuits where several photodiodes may beshared are used as can be found for an example in U.S. Pat. No.6,657,665B1 issued to Guidash, entitled “Active Pixel Sensor with WiredFloating Diffusions and Shared Amplifier”. In this patent, a dual pixelincludes two photodiodes located in the neighboring rows of a sensorimage array that share the same circuit. The shared photodiode conceptcan result in having only two metal bus lines in the row direction andtwo metal bus lines in the column direction per photodiode as shown inFIG. 1. The shared photodiode concept is very useful for designing smallpixels since spacing and width of the metal lines determine a minimumpixel size. The operation of the shared photodiode pixel circuit can beeasily understood from a simplified schematic diagram of the circuit 100shown in FIG. 1. Two photodiodes 101 and 102 are connected through therespective charge transfer transistors 103 and 104 to a FD node 114which detects charge. The FD node 114 is reset by a reset transistor 105to a voltage level appearing on a Vdd node 108. The Vdd node 108 isconnected to a column Vdd bus line 115. Gates of the charge transfertransistors 103 and 104 are biased through the respective horizontal buslines 110 and 111, and a gate of the reset transistor 105 is biasedthrough a horizontal bus line 109. A gate control signal Tx1 of thecharge transfer transistor 103 is transferred through the horizontal busline 110, and a gate control signal Tx2 of the charge transfertransistor 104 is transferred through the horizontal bus line 111. Also,a gate control signal Rx of the reset transistor 105 is transferredthrough the horizontal bus line 109. The FD node 114 is connected to agate of a source follower (SF) transistor 106 that senses a voltage onthe FD node 114. A terminal of the SF transistor 106 is connected to theVdd node 108, thereby being connected to the Vdd column bus line 115. Anoutput of the SF transistor 106 is connected through an addressingtransistor 107 to a common column sense line 113. A horizontal bus line112 controls a bias of the addressing transistor 107. A gate controlsignal Sx of the addressing transistor 107 is transferred through thehorizontal bus line 112. As shown in FIG. 1, there are only two vertical(column) lines, the Vdd bus line 115 and a column sense line 113. Thereare also only two horizontal lines per photo site.

In order to better understand the operation of the 4T pixel, FIG. 2illustrates a cross-sectional view of a simplified device. Thesimplified device 200 includes a single pinned photodiode 205, and acharge transfer transistor and a reset transistor corresponding to thephotodiode 205. A source follower (SF) transistor 201 and an addressingtransistor 202 are shown only schematically including connections of theSF transistor 201 and the addressing transistor 202 to the correspondingcircuit nodes. A terminal of the SF transistor 201 is connected to aterminal bus 231. FIG. 2 also includes a potential diagram 206 of thesimplified device 200, and the potential diagram 206 illustrates acharge transfer flow from the photodiode 205 into a FD node 203 andfinally into a terminal 204, doped with an N⁺-type impurity, duringcharge reset. A pixel is formed in a P-type silicon substrate 219 thathas pixel isolation trenches 207 formed in the P-type silicon substrate219 and filled by an oxide 210. Another oxide layer 218 is grown on atop portion of the substrate 219 that isolates a gate 211 of a chargetransfer transistor and a gate 212 of a reset transistor from thesubstrate 219. The gates 211 and 212 of the charge transfer transistorand the reset transistor are connected to the respective horizontal buslines 213 and 214 that supply a required bias to the gates 211 and 212.Gate control signals Tx and Rx of the charge transfer transistor and thereset transistor are transferred through the horizontal bus lines 213and 214, respectively. The pinned photodiode 205 is formed in thesubstrate 219 by a P⁺-type diffusion region 208 that extends along asidewall of each of the trenches 207 all the way to the P-type substrate219 and by an N-type diffusion region 209. It is also possible to usemore sophisticated doping profiles as is well known to those skilled inthis art. The charge transfer transistor with the gate 211 connects thepinned photodiode 205 to the FD node 203, and the reset transistor withthe gate 212 connects the FD node 203 to the terminal 204 doped with theN⁺-type impurity.

As can be seen from the potential diagram 206 that is located under thecross-sectional view of the simplified device 200 in FIG. 2, potentiallevels of the potential diagram 206 correspond to each device built intothe substrate 219, and the pinned photodiode 205 forms a potential wellthat accumulates a signal charge 221 during the time when the gate 211of the charge transfer transistor is off. The off state of the gate 211of the charge transfer transistor is indicated in the potential diagram216 by a potential level 222. An overflow charge (blooming current) fromthe potential well flows via a path 230 through the reset transistordirectly to the terminal 204. When the charge transfer transistor isturned on, the potential level 222 under the charge transfer transistorchanges to a potential level 223, and the signal charge 221 flows intothe FD node 203. The signal charge transferred into the FD node 203 isindicated by a reference numeral 224. The signal charge 224 causes apotential level 225 of the FD node 203 to change to a new potentiallevel 226. The new potential level 226 represents a voltage signal thatis sensed by the SF transistor 201. When applying an appropriate bias,i.e., a gate control signal Sx, to a gate of the addressing transistor202 through a bus line 215, the addressing transistor 202 is turned onand the voltage signal from the SF transistor 201 is transferred to apixel output bus 216.

The pixel is reset by applying a single reset pulse 217 to thehorizontal bus line 214 connected to the gate 212 of the resettransistor. The pixel reset changes a potential level 227 under thereset transistor to a new potential level 228, which allows the signalcharge 224 to flow into the terminal 204 doped with the N⁺-typeimpurity. The terminal 204 is biased at a Vdd potential level 229, whichis fixed by an external device power source and cannot change. Thus,when all the signal charge 224 is transferred to the terminal 204, theFD node 203 resumes the original potential level 225 of the FD node 203.The potential level 225 of the FD node 203 is only approximately equalto the Vdd potential level 229 due to a reset feed through from the gate212 of the reset transistor and kTC-reset noise. It is thereforedesirable to use the CDS procedure to sample both of the potentiallevels 225 and 226 since a true photo-generated signal is the differencebetween these two potential levels.

As is now clear from the potential diagram 206, a FD voltage swing islimited on a high side by the Vdd potential level 229 and on a low sideby an empty pinned photodiode level 220 of the pinned photodiode 205.When too much signal accumulates in the photodiode 205, not all of thesignal can be transferred into the FD node 203, which results in thelower sensitivity and increased noise. It is desirable to have a largevoltage swing on the FD node 203 and thus decrease the pinned photodiodelevel 220, i.e., a pinning voltage level of the pinned photodiode 205.However, the low pinning voltage level results in a low photodiodecharge storage capacity, thereby causing a low dynamic range (DR) and alow signal to noise ratio (SNR). Accordingly, it is necessary to find asuitable compromise between these two competing requirements. Thiscompromise then determines an ultimate performance of the pixel that isclearly determined by the maximum Vdd potential level 229 that can beused in the sensor. To have a large Vdd potential level is adisadvantage, since the large Vdd potential level increases the sensorpower consumption.

SUMMARY OF THE INVENTION

Embodiments of the present invention are directed toward providing apractical pixel design that can be used in a small pixel and a CMOSimage sensor array with a high performance.

In accordance with an aspect of the present invention, there is provideda charge transfer transistor, including: a first diffusion region and asecond diffusion region; a gate for controlling a charge transfer fromthe first diffusion region and to the second diffusion region by acontrol signal; and a potential well incorporated under the gate,wherein the first diffusion region is a pinned photodiode.

In accordance with another aspect of the present invention, there isprovided a pixel of an image sensor, including: a photodiode forgenerating and collecting a photo generated charge; a floating diffusionregion for serving as a photo generated charge sensing node; a transfergate for controlling a charge transfer from the photodiode to thefloating diffusion region by a control signal; and a potential wellincorporated under the transfer gate.

In accordance with further aspect of the present invention, there isprovided a pixel of an image sensor, including: a photodiode forgenerating and collecting a photo generated charge; a floating diffusionregion for serving as a photo generated charge sensing node; a transfergate for controlling a charge transfer from the photodiode to thefloating diffusion region by a control signal; a potential wellincorporated under the transfer gate; a reset transistor for resettingthe floating diffusion region; a source follower transistor foramplifying a charge signal of the floating diffusion region; and anaddressing transistor for selecting an output of the source followertransistor and providing the selected output as a pixel output.

In accordance with still further aspect of the present invention, thereis provided a row shared photo site pixel, including: a floatingdiffusion region for serving as a sensing node; a plurality ofphotodiodes connected to the floating diffusion region in parallel; aplurality of transfer gates for controlling charge transfers from thephotodiodes to the floating diffusion region by a control signal; and apotential well incorporated by the transfer gates.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a simplified schematic diagram of a typicalrow-shared pixel circuit having two pinned photodiodes per circuit andoperating based on a four transistors (4T) pixel principle.

FIG. 2 illustrates a simplified schematic diagram of a typical pixelincluding a potential diagram showing a flow of an accumulated signal,and a cross-sectional view of a photodiode, a charge transfertransistor, and a reset transistor.

FIG. 3 illustrates a simplified schematic diagram of a pixel including apotential diagram showing a flow of an accumulated signal, and across-sectional view of a photodiode, a charge transfer transistor, anda reset transistor in accordance with an embodiment of the presentinvention.

DESCRIPTION OF SPECIFIC EMBODIMENTS

According to embodiments of the present invention, a potential well thatis formed under a gate of a charge transfer transistor and interfaceswith a floating diffusion (FD) node which detects a charge is used. Theuse of the potential well allows increasing a pinning voltage level of aphotodiode above a minimum excursion of the FD node. As a result, it ispossible to build a CMOS sensor array with a high charge storagecapacity, a high dynamic range (DR), a large signal to noise ratio(SNR), and a very small sized pixel.

More particularly, the potential well is formed under the gate of thecharge transfer transistor. Thus, a floating diffusion voltage swing isnot limited by a pinning voltage level of a new gate structure of thecharge transfer transistor, and as a result, a floating diffusionvoltage can swing lower. The potential well under the gate of the chargetransfer transistor stores an excess charge, prevents the excess chargefrom flowing back to the photodiode, and transfers the excess chargeonto the FD node when the gate of the charge transfer transistor isturned off. Accordingly, the pinning voltage level can be higher thanthat of a gate structure formed without the potential well. The higherpinning voltage level results in a higher photodiode well capacity andthus in a higher DR and a higher SNR. Hereinafter, the embodiment of thepresent invention will be described in more detail with reference toFIG. 3.

FIG. 3 illustrates a cross-sectional view of a simplified device. Thesimplified device 300 includes a single pinned photodiode structure 305,and a charge transfer transistor and a reset transistor corresponding tothe pinned photodiode structure 305. A source follower (SF) transistor301 and an addressing transistor 302 are shown only schematicallyincluding connections of the SF transistor 301 and the addressingtransistor 302 to the corresponding circuit nodes. A terminal 304 and aterminal of the SF transistor 301 are connected to a bus line 331 tosupply a terminal bias Vdd. The simplified device 300 also includes apotential diagram 306, and the potential diagram 306 illustrates acharge transfer flow from a photodiode well into a FD node 303 andfinally into the terminal 304 during the charge reset. The pixel isisolated by trenches 307 formed through a shallow trench isolation (STI)process in a P-type silicon substrate 319. The trenches 307 are filledwith an oxide 310. Another oxide layer 318 is grown on a top portion ofthe substrate 319 that isolates a gate 311 of a charge transfertransistor and a gate 312 of a reset transistor from the substrate 319.The gate 311 of the charge transfer transistor and the gate 312 of thereset transistor are connected to the respective horizontal bus lines313 and 314 that supply the required biases to the gates 311 and 312.Gate control signals Tx and

Rx of the charge transfer transistor and the reset transistor aretransferred through the horizontal bus lines 313 and 314, respectively.The pinned photodiode 305 is formed in the substrate 319 by a P⁺-typediffusion region 308 that extends along a sidewall of each of thetrenches 307 all the way to the P-type substrate 319 and by an N-typediffusion region 309. The charge transfer transistor with the gate 311connects the pinned photodiode 305 to the FD node 303 and the resettransistor with the gate 312 connects the FD node 303 to the terminal304 doped with an N⁺-type impurity. The charge transfer transistor hasan additional N-type implantation region 331 formed under the gate 311of the charge transfer transistor, thereby forming a potential well onthe side of the FD node 303 in the substrate 319.

As can be seen from the potential diagram 306 shown under thecross-sectional view of the simplified device 300, potential levelscorresponding to each device that is built into the substrate 319 areshown. The pinned photodiode 305 forms a pinned photodiode potentialwell that accumulates a signal charge 321 during the time when the gate311 of the charge transfer transistor is turned off. The off state ofthe gate 311 of the charge transfer transistor is indicated in thepotential diagram 306 by a potential level 322. An overflow charge (ablooming current) from the potential well flows via a path 334 to theterminal 304. When the gate 311 of the charge transfer transistor isturned on, the potential level 322 under the gate 311 of the chargetransfer transistor changes to a potential level 323, and the signalcharge 321 flows into the FD node 303 doped with an N⁺-type impurity.The signal charge transferred into the FD node 303 is indicated by areference numeral 324. Accordingly, a potential level 325 under the FDnode 303 is changed to a new potential level 326. As the potentialdiagram 306 illustrates, the signal charge 324 is located not only inthe FD node 303 but also fills the potential well formed by theimplantation region 331 formed under the gate 311 of the charge transfertransistor. The signal charge filling the potential well formed by theimplantation region 331 is indicated by a reference numeral 332. Some ofthe signal charge 324 may also spread over a barrier. When the gate 311of the charge transfer transistor is turned off, the potential level 323under the gate 311 of the charge transfer transistor changes back to thepotential level 322. The signal charge 332 stored in the potential wellformed by the implantation region 331 now flows into the FD node 303which detects the signal charge 332 and lowers further a final potentiallevel to a potential level 333. The potential level 333 may now be lowerthan a potential level 320 in a potential value as shown in thepotential diagram 306.

As is now clear from the potential diagram 306, a voltage swing of theFD node 303 can be higher and not be limited on a low side by thepotential level 320, i.e., an empty pinned photodiode potential level.The voltage swing of the FD node 303 is now significantly increased incomparison to the typical voltage swing. As a result, both the chargestorage capacity and the voltage swing of the FD node 303 which detectsthe charge can be increased when a suitable compromise and optimumconditions are found. A pixel performance can thus be significantlyimproved without causing any penalty to an image sensor powerconsumption or a silicon chip area.

According to the embodiments of the present invention, a novel pixelgenerating a higher dynamic range (DR) and a better signal to noiseratio (SNR), and having a higher well capacity and a higher voltageswing on a FD node is described. The embodiments of the presentinvention can be accomplished by incorporating a potential well formedunder the gate of the charge transfer transistor. This improvements andinnovations are not intended to limit but to be illustrative. Also,persons skilled in this art can make modifications and variations inlight of the above teaching. It is therefore to be understood thatchanges may be made in the particular embodiment of the presentinvention disclosed, which are within the scope and sprit of theinvention as defined by appended claims.

For instance, it is possible to apply the embodiment of the presentinvention which incorporates a potential well formed under a gate of acharge transfer transistor to a row shared photo site pixel including aplurality of photodiodes connected to a FD node in parallel, and aplurality of gates of a charge transfer transistor which control acharge transfer from the photodiodes corresponding to transfer signalsto the single FD node.

According to the embodiments of the present invention, a CMOS sensorarray having a high charge capacity, a high dynamic range (DR), a largesignal to noise ratio (SNR), and a small sized pixel can be fabricated.

While the present invention has been described with respect to thespecific embodiments, it will be apparent to those skilled in the artthat various changes and modifications may be made without departingfrom the spirit and scope of the invention as defined in the followingclaim.

1-12. (canceled)
 13. A method, comprising: forming a photodiode in asubstrate having a first conductivity type; forming, in the substrate, afloating diffusion region having a second conductivity type; implantingan impurity of the second conductivity type to form an implantationregion in the substrate between the photodiode and the floatingdiffusion region; and forming a charge transfer gate on the substratebetween the photodiode and the floating diffusion region; wherein saidimplanting comprises implanting the implantation region such that theimplantation region is positioned under the charge transfer gate andtoward a side of the charge transfer gate associated with the floatingdiffusion region.
 14. The method of claim 13, wherein said implantingcomprises implanting an N-type impurity to form an N-type impurityregion for the implantation region.
 15. The method of claim 13, whereinsaid implanting comprises implanting the implantation region such thatthe implantation region is not under the floating diffusion region. 16.The method of claim 13, wherein said implanting comprises forming theimplantation region such that the implantation region is configured tostore a charge from the photodiode, prevent the charge from flowing backto the photodiode, and transfer the charge onto the floating diffusionregion in response to turning-off the charge transfer gate.
 17. Themethod of claim 13, further comprising: forming a reset transistorconfigured to reset the floating diffusion region; forming a sourcefollower transistor configured to amplify a charge signal of thefloating diffusion region; and forming an addressing transistorconfigured to select an output of the source follower transistor and toprovide the selected output as a pixel output.
 18. The method of claim13, further comprising: forming another photodiode in the substrate;implanting the impurity to form another implantation region in thesubstrate between the other photodiode and the floating diffusionregion; and forming another charge transfer gate on the substratebetween the other photodiode and the floating diffusion region; whereinsaid implanting the impurity to form another implantation regioncomprises implanting the other implantation region such that the otherimplantation region is positioned under the other charge transfer gateand toward a side of the other charge transfer gate associated with thefloating diffusion region.
 19. The method of claim 18, wherein saidimplanting the impurity to form another implantation region comprisesforming the other implantation region such that the other implantationregion is configured to store a charge from the other photodiode,prevent the charge from flowing back to the other photodiode, andtransfer the charge onto the floating diffusion region in response toturning-off the other charge transfer gate.
 20. A method, comprising:collecting charge with a photodiode; in response to turning on a chargetransfer transistor, transferring charge from the photodiode to both afloating diffusion region and an implantation region that is separatefrom the floating diffusion region and located under a charge transfergate of the charge transfer transistor toward a side of the chargetransfer gate associated with the floating diffusion region; and inresponse to turning off the charge transfer transistor, transferringcharge from the implantation region to the floating diffusion region.21. The method of claim 20, further comprising resetting the floatingdiffusion region prior to said transferring charge from the photodiodeto both the floating diffusion region and the implantation region. 22.The method of claim 20, further comprising generating an output signalindicative of charge received by the floating diffusion region from thephotodiode and the implantation region.
 23. The method of claim 20,further comprising: collecting charge with another photodiode; inresponse to turning on another charge transfer transistor, transferringcharge from the other photodiode to both the floating diffusion regionand another implantation region that is separate from the floatingdiffusion region and located under another charge transfer gate of theother charge transfer transistor toward a side of the other chargetransfer gate associated with the floating diffusion region; and inresponse to turning off the other charge transfer transistor,transferring charge from the other implantation region to the floatingdiffusion region.
 24. The method of claim 23, further comprisingresetting the floating diffusion region prior to said transferringcharge from the other photodiode to both the floating diffusion regionand the other implantation region.
 25. The method of claim 23, furthercomprising generating an output signal indicative of charge received bythe floating diffusion region from the other photodiode and the otherimplantation region.
 26. A method, comprising: transferring charge froma photodiode to both a floating diffusion region and a charge collectionregion that is separate from the floating diffusion region in responseto a first control signal; and transferring charge from the chargecollection region to the floating diffusion region in response to asecond control signal.
 27. The method of claim 26, further comprising,in response to the first control signal, turning on a charge transfertransistor to transfer charge from the photodiode to both the floatingdiffusion region and the charge collection region.
 28. The method ofclaim 27, further comprising, in response to the second control signal,turning off the charge transfer transistor to transfer charge from thecharge collection region to the floating diffusion region.
 29. Themethod of claim 26, further comprising, in response to the first controlsignal, turning on a charge transfer transistor to transfer charge fromthe photodiode to both the floating diffusion region and the chargecollection region located under a charge transfer gate of the chargetransfer transistor and toward the floating diffusion region.
 30. Themethod of claim 26, further comprising: transferring charge from anotherphotodiode to both the floating diffusion region and another chargecollection region that is separate from the floating diffusion regionand the charge collection region in response to a third control signal;and transferring charge from the other charge collection region to thefloating diffusion region in response to a fourth control signal. 31.The method of claim 30, further comprising, in response to the thirdcontrol signal, turning on another charge transfer transistor totransfer charge from the photodiode to both the floating diffusionregion and the other charge collection region located under a chargetransfer gate of the another charge transfer transistor and toward thefloating diffusion region.
 32. The method of claim 31, furthercomprising, in response to the fourth control signal, turning off theother charge transfer transistor to transfer charge from the othercharge collection region to the floating diffusion region.